Innovative Technology for Building Ultralow-Loss Integrated Photonic Circuits

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Integrated Silicon Nitride Photonic Chips

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Integrated silicon nitride photonic chips with meter-long spiral waveguides. Credit: Jijun He, Junqiu Liu (EPFL)

Encoding details into light, and sending it through fiber optics lies at the core of optical interactions. With an exceptionally low loss of 0.2 dB/km, fiber optics made from silica have actually laid the structures of today’s international telecommunication networks and our details society.

Such ultralow optical loss is similarly important for incorporated photonics, which make it possible for the synthesis, processing and detection of optical signals utilizing on-chip waveguides. Today, a variety of ingenious innovations are based upon incorporated photonics, consisting of semiconductor lasers, modulators, and photodetectors, and are utilized thoroughly in information centers, interactions, noticing and calculating.

Integrated photonic chips are normally made from silicon that is plentiful and has excellent optical homes. But silicon can’t do whatever we require in incorporated photonics, so brand-new product platforms have actually emerged. One of these is silicon nitride (Si3N4), whose incredibly low optical loss (orders of magnitude lower than that of silicon), has actually made it the product of option for applications for which low loss is important, such as narrow-linewidth lasers, photonic hold-up lines, and nonlinear photonics.

Now, researchers in the group of Professor Tobias J. Kippenberg at EPFL’s School of Basic Sciences have actually established a brand-new innovation for developing silicon nitride incorporated photonic circuits with record low optical losses and little footprints. The work is released in Nature Communications.

Combining nanofabrication and product science, the innovation is based upon the photonic Damascene procedure established at EPFL. Using this procedure, the group made incorporated circuits of optical losses of just 1 dB/m, a record worth for any nonlinear integrated photonic product. Such low loss considerably lowers the power budget plan for developing chip-scale optical frequency combs (“microcombs”), utilized in applications like meaningful optical transceivers, low-noise microwave synthesizers, LiDAR, neuromorphic computing, and even optical atomic clocks. The group utilized the brand-new innovation to establish meter-long waveguides on 5×5 mm2 chips and high-quality-factor microresonators. They likewise report high fabrication yield, which is important for scaling as much as commercial production.

“These chip devices have already been used for parametric optical amplifiers, narrow-linewidth lasers and chip-scale frequency combs,” states Dr. Junqiu Liu who led the fabrication at EPFL’s Center of MicroNanoTechnology (CMi). “We are likewise eagerly anticipating seeing our innovation being utilized for emerging applications such as meaningful LiDAR, photonic neural networks, and quantum computing.”

Reference: “High-yield, wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits” by J. Liu, G. Huang, R. N. Wang, J. He, A. S. Raja, T. Liu, N. J. Engelsen and T. J. Kippenberg, 16 April 2021, Nature Communications.
DOI: 10.1038/s41467-021-21973-z